Digital Tbucket Tank (DTT)

German Future Prize 2020: EUV developers from TRUMPF, ZEISS and Fraunhofer nominated!

The office of the Federal President today announced the nominees for the German Future Prize 2020 in the Hall of Honor of the Deutsches Museum in Munich. In the circle of the best - the three projects for the final round of the Federal President's Prize for Technology and Innovation - is a team of experts from TRUMPF, ZEISS and Fraunhofer IOF: With their project "EUV lithography - New light for the digital age", Dr. . Peter Kurz, ZEISS Semiconductor Manufacturing Technology (SMT) division, Dr. Michael Kösters, TRUMPF Lasersystems for Semiconductor Manufacturing, and Dr. Sergiy Yulin, Fraunhofer Institute for Applied Optics and Precision Mechanics IOF in Jena, nominated.

The team of experts in front of the world's most powerful pulsed industrial laser, which is used to generate light to enable EUV lithography (from left): Dr. Peter Kurz, ZEISS SMT Division, Dr. Michael Kösters, TRUMPF Lasersystems for Semiconductor Manufacturing and Dr. Sergiy Yulin, Fraunhofer Institute for Applied Optics and Precision Mechanics IOF